Troubleshooting Slow Heat-Up in a Wafer Heater System

https://engineered-thermal-hub.silverstonebrief.com/posts/ito-glass-heater-design-factors-for-consistent-temperature-control

In wafer heating chucks, a wafer heater must deliver heat in a controlled way. It uses a controlled heating assembly designed to warm a wafer support or chuck. One useful trait is multi-zone control. Still, sensor offset can change the result